- photomask pattern generator
The New English-Russian Dictionary of Radio-electronics. F.V Lisovsky . 2005.
photomask pattern generator
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Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… … Wikipedia
